Frontiers of Nanolithography: The Science of Making the Small Stuff

Presenter Full Name
Dr. Keith Jackson
Institution
Lawrence Berkeley National Laboratory
Year & Semester
2005 Spring
Presentation Date
March 8, 2005

Dr. Keith Jackson of the Lawrence Berkeley National Laboratory will explore the use of photons and electrons for lithographic applications and the devices fabricated at the Center for X-ray Optics for diffractive optics used in the extreme ultraviolet (EUV) portion of the electromagnetic spectrum.