Frontiers of Nanolithography: The Science of Making the Small Stuff

Dr. Keith Jackson
Lawrence Berkeley National Laboratory

Darwin 103
3:00 PM

Dr. Keith Jackson of the Lawrence Berkeley National Laboratory will explore the use of photons and electrons for lithographic applications and the devices fabricated at the Center for X-ray Optics for diffractive optics used in the extreme ultraviolet (EUV) portion of the electromagnetic spectrum.