Presenter Full Name
:
Dr. Keith Jackson
Institution
:
Lawrence Berkeley National Laboratory
Year & Semester
:
2005 Spring
Presentation Date
:
March 8, 2005
Dr. Keith Jackson of the Lawrence Berkeley National Laboratory will explore the use of photons and electrons for lithographic applications and the devices fabricated at the Center for X-ray Optics for diffractive optics used in the extreme ultraviolet (EUV) portion of the electromagnetic spectrum.