Sub-Micron Lithography

Presenter Full Name
Doug Gray
Hewlett-Packard Company
Year & Semester
1981 Spring
Presentation Date
March 2, 1981

Doug Gray of the Hewlett-Packard Company, Santa Rosa, will discuss current and proposed methods for the replication of micron and sub-micron geometries for semiconductor devices and integrated circuits using optics, electron beams, and x-rays.