Presenter Full Name
:
Doug Gray
Institution
:
Hewlett-Packard Company
Year & Semester
:
1981 Spring
Presentation Date
:
March 2, 1981
Doug Gray of the Hewlett-Packard Company, Santa Rosa, will discuss current and proposed methods for the replication of micron and sub-micron geometries for semiconductor devices and integrated circuits using optics, electron beams, and x-rays.