the Use of Light to Measure Nanometer Scale Geometries

Presenter Full Name
Dr. Pablo Rovira
Institution
Nanometrics, Inc.
Year & Semester
2002 Fall
Presentation Date
September 16, 2002

Dr. Pablo Rovira of Nanometrics, Inc. will discuss how basic properties of light can be used as a tool to obtain accurate dimensions and geometries of subnanometer devices.